SIMS and RBS Investigation of Zn Implanted Si
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چکیده
منابع مشابه
Pb diffusion in monazite: A combined RBS/SIMS study
We report measurements of Pb diffusion in both synthetic (CePO4) and natural monazites run under dry, 1-atm conditions. Powdered mixtures of prereacted CePO4 and PbZrO3 were used as the source of Pb diffusant for “in-diffusion” experiments conducted in sealed Pt capsules for durations ranging from a few hours to several weeks. Following the diffusion anneals, Pb concentration profiles were meas...
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چکیده ندارد.
Lattice sites of implanted Fe in Si
The angular distribution of − particles emitted by the radioactive isotope Fe was monitored following implantation into Si single crystals at fluences from 1.4 1012 cm−2 to 1 1014 cm−2. We identified Fe on three distinct sites: ideal substitutional, displaced substitutional and displaced tetrahedral interstitial. Whereas displaced substitutional Fe was dominating for annealing temperatures belo...
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The lattice location of implanted silver in Si was studied by means of the emission channeling technique. Following 60 keV room temperature implantation of radioactive Ag at a dose of 2-3×10 cm, we identify around 30% of Ag on near-substitutional sites (≈0.45 Å from ideal S-sites). Upon annealing at 200-300°C, the fraction on near-S sites reaches a maximum around 60-80%. For higher annealing te...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2011
ISSN: 1742-6596
DOI: 10.1088/1742-6596/281/1/012031